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Jenny publicado por Dolor de garganta en chica The present invention relates to a method of manufacturing a semiconductor device and to a structure of the semiconductor device. The present invention is particularly suited for the manufacture of a semiconductor device including a semiconductor film having a crystalline structure.
Along with the recent progress in the degree of integration of semiconductor devices, the size of each device has been reduced. As a result, it has become extremely difficult to realize a structure of a semiconductor device which can meet the demand for performance enhancement.
For example, SiC devices are expected as next-generation power devices because they can be operated at a higher temperature than Si devices and their withstand voltage is higher. In the field of SiC semiconductor devices such as SiC FETs, for instance, there are expectations for the use of SiC films having a crystal structure in which the (0001) direction is the [111] direction in a hexagonal system of SiC.
Here, the (0001) direction refers to a direction in which SiC crystals grows. Accordingly, the (0001) direction is a direction in which SiC crystals grow, and the (000-1) direction is a direction in which SiC crystals do not grow.
FIGS. 1A to 1C are schematic cross-sectional views of the structure of an SiC semiconductor device at the respective stages of manufacture. FIG. 1A is an initial state of the SiC semiconductor device.
Here, a (0001) SiC semiconductor substrate 10 is prepared. As illustrated in FIG. 1A, the surface of the SiC semiconductor substrate 10 is first wet-etched to form an etch pit 12 having a circular shape.
Then, as illustrated in FIG. 1B, amorphous Si (a-Si) films 14 are formed in the shape of a circular column around the etch pit 12.
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